Silicon Wafer 2 inch wafer Parameter Characteristic ASTM Control Method Type/Dopant P, Boron N, Phosphorous N, Antimony N, Arsenic F42 Orientations <100>, <111> slice off orientations per customer’s specifications F26 Oxygen Content 10-20 ppmA Custom tolerances per customer’s specification F121 Carbon Content 0.5 – 1.0 ppmA Custom tolerances per customer’s ..
