MS-Q 2".3".4".5".6" Quartz Wafer Jig
MS-Q 2".3".4".5".6" Quartz Wafer Jig
MS-QWF
Quartz wafer, Quartz window
▶ Characteristic: - High chemical purity - Permeability - Extreme hardness - Very low coefficient of thermal expansion - Resistance to high temperature & corrosion - Extensive optical transmission from UV to IR - Excellent electrical insulation qualities |
▶ Application: |
- A substrate for thin film deposition - An oscillator for communication equipment - UV and IR Optical Components, Lasers, Flame Detectors, Instrumentation, etc. - A substrate for LCD Display |
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▶ Specification |
Product | Quartz wafer | Quartz substrate(window) | Diameter | 2", 3", 4", 5", 6", 8", 12" | 10X10mm, 2"X2", 4"X4" or Adjustable | Shape | Round, Round w/ flat | Square or Adjustable | Edge form | Straight, W.chamfer | Material | Fused Silica(standard, OH<1200ppm), Fused Quartz | Thickness | 500um, 700um, 1mm or adjustable | Grade | Optical grade, Semiconductor grade | Surface | One side polished, Two side polished |
Features: - 2" wafer boat is made of ultra-high purity quart (4N purity) with 1200oC working temperature
- Can carry 25 piece wafers of 2" diameter x 0.5 mm thickness in each boat
- Design for diffusion, oxidation and annealing 2" Si wafer
- Can fit in MTI OTF1200-3 tube furnace (3" tube furnace )
- MS -QW(4" Size:100*150*20mmH(10mmW10Hole)
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