Quartz wafer, Quartz window
▶ Characteristic:
- High chemical purity
- Permeability
- Extreme hardness
- Very low coefficient of thermal expansion
- Resistance to high temperature & corrosion
- Extensive optical transmission from UV to IR
- Excellent electrical insulation qualities |
| ▶ Application: |
|
- A substrate for thin film deposition
- An oscillator for communication equipment
- UV and IR Optical Components, Lasers, Flame Detectors, Instrumentation, etc.
- A substrate for LCD Display |
|
| ▶ Specification |
|
Product |
Quartz wafer |
Quartz substrate(window) |
|
Diameter |
2", 3", 4", 5", 6", 8", 12" |
10X10mm, 2"X2", 4"X4" or Adjustable |
|
Shape |
Round, Round w/ flat |
Square or Adjustable |
|
Edge form |
Straight, W.chamfer |
|
Material |
Fused Silica(standard, OH<1200ppm), Fused Quartz |
|
Thickness |
500um, 700um, 1mm or adjustable |
|
Grade |
Optical grade, Semiconductor grade |
|
Surface |
One side polished, Two side polished |
Features:
- 2" wafer boat is made of ultra-high purity quart (4N purity) with 1200oC working temperature
- Can carry 25 piece wafers of 2" diameter x 0.5 mm thickness in each boat
- Design for diffusion, oxidation and annealing 2" Si wafer
- Can fit in MTI OTF1200-3 tube furnace (3" tube furnace )
- MS -QW(4" Size:100*150*20mmH(10mmW10Hole)
|
제품에 대한 문의사항이 있으시면 아래 e-mail, 전화 문의 바랍니다.